Items where Author is "Xu, Rui"
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Article
Xu, Rui and Zhou, Zhongchao and Li, Jing and Zhang, Xu and Zhu, Yuanyuan and Xiao, Hongping and Xu, Lina and Ding, Yihong and Li, Aidong and Fang, Guoyong (2022) Reaction mechanism of atomic layer deposition of zirconium oxide using zirconium precursors bearing amino ligands and water. Frontiers in Chemistry, 10. ISSN 2296-2646